Characterization of new electronic components is essential to their design and ultimately to ensure their reliability. The 7th edition of the Carac Symposium took place online on the IRT Nanoelec webinar platform gathering 50 attendees. This edition focused on the performance gains of the very large equipment available under the Nanoelec / Characterization program, at the ESRF (now the most efficient synchrotron source in the world), at the ILL (nuclear reactor dedicated to research thanks to neutrons) and CNRS/LPSC.
The increasing complexity of electronic components and technologies, as well as the diversification of materials and manufacturing processes in the More-than-Moore approach require characterization that exceeds the performance of conventional laboratory equipment. To accurately correlate the micro and nanometric characteristics of materials with the macroscopic properties of components, researchers need to gain in spatial resolution, detection capability and acquisition speed. This is why they use very specific beams of photos and neutrons from large instruments among the best in the world available on the scientific peninsula of Grenoble.
Agenda, Abstracts & PDF
CARAC is a unique event dedicated to materials characterisation for industry. It is led by the Technological Research Institute IRT Nanoelec, a real innovation accelerator for the microelectronics industry. CARAC 2020 will take place in the morning of November 24th between 9 and 12 am with online talks in English. In the context of COVID19 pandemic this 7th edition will be only an online event. It will be an occasion to learn more about materials characterisation techniques for the industries and new facilities in the Grenoble area.
|Ennio Capria, Conference Chair
Soon at the Institut Laue-Langevin: TENIS instrument and major upgrades
The Institute Laue-Langevin has entered the second phase of its upgrade programme named Endurance for the period 2020-2023. The presentation will highlight key features including remote control of instruments and digital twins. A focus will be made on radiation testing, imaging and nano-characterisation.
EBS: The new Extremely Brilliant Source from the European Synchrotron in Grenoble, a new generation tool unique in the world to meet the new characterization challenges
Since 2009, the ESRF (European Synchrotron Radiation Facility), one of the most intense sources of synchrotron light in the world, has been engaged in an ambitious modernization program, the “Upgrade Program”. After the successful delivery of the first phase over the period 2009-2015, in May 2015, the ESRF launched an innovative and unique project, “ESRF EBS”, EBS for Extremely Brilliant Light Source. The ESRF – EBS represents an investment of 150 million euros. The new source was inaugurated this summer and on August 25 the ESRF reopened its doors to industrial and academic users after an 18-month shutdown.
While Phase I focused on the design and construction of a new generation of beamlines to explore the nanoworld (19 lines), the second phase represented a real technological challenge. The ESRF – EBS delivered a new extremely bright light source, a new 844m storage ring, installed within the existing structure, almost 90% reused. This new storage ring produces X-rays 100 times brighter than those produced by the previous generation.
The ESRF – EBS also includes an ambitious instrumentation program and an enhanced “big data” strategy, allowing full exploitation of the exceptional properties of this new synchrotron light source.
This pioneering project, supported by the 21 partner countries of the ESRF, will open up new scientific perspectives for the exploration of matter and for the life sciences. It will thus help to meet the new scientific, technological, economic, environmental and societal challenges facing our world.
The ESRF-EBS project, identified as a “landmark” in ESFRI’s European roadmap, represents an investment of 150 million euros over the period 2015-2022, which follows on the 180 million euros invested during the phase I of the Upgrade Program (2009-2015).
Fast neutron GENESIS platform
The GEnerator of NEutrons for Science and IrradiationS (GENESIS) produces a flux of fast neutrons at an energy of 14 MeV (or 2.5 MeV). The neutron source is provided by an electrostatic accelerator delivering 220 keV deuterons onto a tritiated (or deutered) target. It is used both for academic research (nuclear physics experiments, detector tests) and irradiations. Lately it was widely used to irradiate micro-electronics components in order to investigate their resistance to neutron flux. The facility is operated by the Laboratory of Subatomic Physics and Cosmology (CNRS, G-INP, UGA) located on the scientific polygon of Grenoble, next to ILL and ESRF.
Over the last few years, the facility was upgraded mainly to boost the neutron flux and improve the reliability of the machine. A compact ECR ion source was installed to produce a continuous and intense deuteron beam. Significant shielding was also added to the existing infrastructure in order to support the neutron flux increase. Presently, the maximum 14 MeV neutron flux reaches 5.10^7 n.s^-1.cm^-2 at the location of the sample.
The facility and its performances will be presented, as well as different types of applications.
Hard X-ray Photoelectron Spectroscopy (HAXPES) at the PFNC CEA-Leti
Photoemission with hard X-rays expanded over the past 15 years the field of sub-surface analysis thanks to the advent of 3rd generation synchrotron radiation facilities enabling providing to HAXPES high energy resolution, large-range depth tuning and high sensitivities, at the expense of access time and short-time scheduling.
Recently, lab-scale instruments have emerged and got commercially available. These offer interesting complementarities to synchrotron HAXPES in terms of analytical throughput and accuracy in elemental quantification. In this talk, we will provide an overview of the systems currently available, and present some case studies in the field of nanoelectronics and energy storage technologies, including comparisons with synchrotron experiments.
Materials characterisation platforms at Institut Néel
The Institut Néel is a laboratory for fundamental research in condensed matter physics. The experimental platforms of Institut Néel gather technical skills and equipment used by researchers and industrials. These platforms are used as tools for research as well as for training. Some of them are used in the frame of contracts with industrials.
Materials characterisation plays a major role at Institut Néel. The laboratory offers a wide range of various characterisation devices and instruments developed by researchers and technicians. The characterisation techniques allow to measure structural and physical properties of materials.
Structural properties are measured thanks to probes made of particles (electrons, neutrons…) and visible light or X-rays. In this category, one can find diffractometers for material cristallography, spectrometers providing information on mechanical properties and chemical bonding, atomic force and electron microscopes equipped with various analytical devices…
Physical properties include magnetic properties, electronic structure, electronic transport… Optical and electron microscopy techniques enable to measure these properties at a small scale.
Imagery techniques play an increasing role among all these tools, for the study of nanometric devices but also because physical properties of bulk materials are often related to their microstructure. The understanding of the relationship between the two allow to enhance their characteristics. The laboratory operates a wide panel of microscopes, gathered in platforms, including atomic force, optical and electron microscopes.
Many characterisation techniques are also used at Institut Néel for training activities towards the students of Université Grenoble Alpes, and industrials, thanks to «CNRS Entreprise» more especially.
Grenoble INP-CMTC: the materials characterization center of Grenoble Institute of Engineering and Management, Université Grenoble Alpes
The CMTC characterization platform is a fully staffed unit for physic-chemical and microstructural characterization at various scales, serving the materials community with a range of state-of-the-art characterization equipments and support services available for both academic and industrial laboratories as well as for educational training of students. The resources are divided into centres of excellence: Electron microscopy (SEM, TEM, FIB, EDS, WDS, EBSD, ASTAR…), X-rays (X-ray diffraction, X-ray reflectivity, in-situ), Optical analysis (Raman spectroscopy), Surface analysis (XPS), X-ray tomography (non-destructive 3D imaging), High performance scientific imaging (high-speed, high-resolution cameras and infrared imaging technique) and Sample preparation. This platform has a long history of sharing facilities. With more than forty years of experience in the field of material science characterization, the CMTC platform has acquired a strong reputation for scientific expertise and quality service. The CMTC offers a range of comprehensive solutions to serve the characterization needs of its industry partners and clients.
Interdisciplinary Research Institute of Grenoble (Irig)
The IRIG is the 1000-people fundamental research institute of the CEA-Grenoble, acting in various fields ranging from biology to condensed matter physics. As such, it owns or share many characterization tools that are used for its own research or in collaborations, including industrial partners. I will present a few recent tools that can be relevant to the Nanoelec IRT partners: these include the MicroLaue tool for material strain mapping that is available on a French CRG beamline at ESRF, and recent developments in the field of Focussed Ion Beam / Scanning Electron Microscopy available at PFNC.
The Technological Research Institut (IRT) Nanoelec 2021-2025 and its large-scale instruments characterisation program
IRT Nanoelec runs multi-partner R&D dissemination and development programs to make the microelectronics sector more competitive. It is based in Grenoble, France, a leading global hub for research and innovation in microelectronics. IRT Nanoelec is a consortium of 21 members from the private and public sectors.
The aim of IRT Nanoelec members is to work together to carry out research and development programs to help businesses create value and grow. Information and communication technologies professionals work in the frame of Nanoelec for the digital transition, energy transition and secure connected systems fields.
Dedicated to the characterisation of advanced industrial micro- and nano-electronics, the Nanoelec large-scale instruments characterisation program , brings together the European Synchrotron Radiation Facility (ESRF) for intense, finely focused X-ray beams, the Institut Laue Langevin (ILL) for high intensity neutron beams, and the CEA Platform for nano-characterisation (PFNC) using a huge range of laboratory facilities including SEM, TEM, and advanced sample preparation.
Digital visits live from ESRF & ILL
|Ennio Capria & Caroline Boudou